Fabrication of an Implantable Micro-pressure Sensor to Measure Deviation Within the Cochlea

Leonardo Perez; Robert Puers; Bart Volckaerts

doi:10.22490/25394088.1102

Vol. 7 (2013)

Published

2013-06-02

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Perez, L., Puers, R., & Volckaerts, B. (2013). Fabrication of an Implantable Micro-pressure Sensor to Measure Deviation Within the Cochlea. Publicaciones E Investigación, 7, 11-18. https://doi.org/10.22490/25394088.1102

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Fabrication of an Implantable Micro-pressure Sensor to Measure Deviation Within the Cochlea

DOI: https://doi.org/10.22490/25394088.1102

Section

Artículo teórico

Leonardo Perez ESAT, Katholieke Universiteit Leuven

Robert Puers ESAT, Katholieke Universiteit Leuven

Bart Volckaerts ESAT, Katholieke Universiteit Leuven

The Cochlear Implant is broadly worn by people with deep hearing damage. This device makes up an electrode array to electrically stimulate the auditory nerves. When the electrode is implanted into the inner ear by surgery, the scala tympani is ill-treated due to the strong pressure applied on the internal ear structures. To minimize this intra-cochlear trauma, it is proposed to fabricate a micro pressure-sensor and built it in the electrode array, in such a way that the pressure applied by the electrode is measured. This work selected the MEMS SU-8 Fabry-Perot interferometer-based pressure sensor. This paper describes the sensor fabrication process carried out, and explains how to integrate this sensor with the electrode array.

Cochlear implant, MEMS sensor, SU8 material, Intra-cochlear trauma

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Fabrication of an Implantable Micro-pressure Sensor to Measure Deviation Within the Cochlea

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